Optical Mems, Nanophotonics, and Their Applications

This book presents advances in optical MEMS and nanophotonics, covering device design fundamentals and a range of optical and photonic system applications. The chapters showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems.

Section I Optical MEMS for communication, imaging, and sensing applications 1 Optical MEMS: An introduction Guangya Zhou and Chengkuo Lee 2 MEMS optical scanners for laser projection display Hiroshi Toshiyoshi 3 Optical micro-electrical-mechanical phased array Youmin Wang and Ming-Chiang Wu 4 Optical MEMS for space: Design, characterization, and applications Frederic Zamkotsian 5 MEMS vibratory grating scanners and their applications Guangya Zhou 6 F-P filters and applications in spectrometers and gas sensing Chong Pei Ho and Chengkuo Lee 7 Electrothermally actuated MEMS mirrors: Design, modeling, and applications Huikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal 8 MEMS tunable optics: Liquid and solid methods Yongchao Zou and Guangya Zhou Section II Nanophotonics for communication, imaging, and sensing applications 9 Physical sensors based on photonic crystals Bo Li and Chengkuo Lee 10 Silicon photonic variable waveguide coupler devices Kazuhiro Hane 11 Metasurface and ultrathin optical devices Xianzhong Chen, Dandan Wen, and Fuyong Yue 12 Optical micro- and nanoresonators for biochemical sensing Xingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou 13 Terahertz MEMS metamaterials Prakash Pitchappa and Chengkuo Lee Section III Biomicro- and nanophotonics and optofluidics for health care applications 14 Optofluidic devices and their applications Sung-Yong Park 15 Implantable CMOS microphotonic devices Jun Ohta and Takashi Tokuda 16 Microfluidic photocatalysis Ning Wang and Xuming Zhang