Handbook of VLSI Microlithography

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

Issues and Trends Affecting Lithography Tool Selection Strategy Resist Technology u Design, Processing, and Applications Lithography Process Monitoring and Defect Detection Techniques and Tools for Photo Metrology Techniques and Tools for Optical Lithography Microlithography Tool Automation Electron-Beam ULSI Applications Rational Vibration and Structural Dynamics for Lithographic Tool Installations Applications of Ion Microbeams Lithography and Direct Processing X-Ray Lithography Part I Part II Acknowledgment References Index