Multi-Stage Actuation Systems and Control

The book aims at empowering readers with a clear understanding of multi-stage mechanism, different microactuators’ performances, their limitations to control system performance and problems encountered in control system design and techniques for solving these problems and dealing with these limitations.

Mechanical Actuation Systems. High-precision Positioning Control of Dual-stage Actuation Systems. Control of Thermal Microactuator Based Dual-stage Actuation Systems. Modeling and Control of Three-stage Actuation Systems. Dual-stage System Control Considering Secondary Actuator Stroke Limitation. Saturation Control for Microactuators in Dual-stage Actuation Systems. Time Delay and Sampling Rate Effect on Control Performance of Dual-stage Actuation Systems. PZT Hysteresis Modeling and Compensation. Seeking Control of Dual-stage Actuation Systems with Trajectory Optimization. High-Frequency Vibration Control Using PZT Active Damping. Self-Sensing Actuation of Dual-stage Systems. Modeling and Control of A MEMS Micro X-Y stage Media Platform. Conclusions.