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Catalytic Chemical Vapor Deposition

Author: Hideki Matsumura
Hironobu Umemoto
Karen Gleason
Ruud E.I. Schropp
Ruud Schropp

Publishing date: 2019

The authoritative reference on catalytic chemical vapor deposition?written by the inventor of the technologyThis comprehensive book covers a wide scope of Cat-CVD and related technologies?from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field?including the father of catalytic chemical vapor deposition?it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques.Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep

701.00 zł

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Catalytic Chemical Vapor Deposition