Surfaces Interfaces and Films for Microelectronics

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials.

Preface. Part I: Fundamentals of Surfaces and Interfaces. 1. Introduction to Surfaces. 2. Structure of Surfaces. 3. Thermodynamics of Surfaces and Interfaces. 4. Surface Roughness. 5. Surface electronic States. 6. Other Surface Probes. 7. Charged Surfaces. 8.Adsorption. 9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films. Part II: Microelectronics Applications. 10. Films and Interfaces. 11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces. 12. The Si-SiO 2 Interface and Other MOSFET Interfaces. Index.